摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pressure sensor that utilizes improved heat-resistant detecting materials. <P>SOLUTION: The pressure sensor (10) includes a movable component (16) that is configured to move, when the pressure sensor is exposed to differential pressure thereacross, and a pressure-sensing component (20) located on the movable component. The pressure-sensing component includes an electrically conductive electron gas which changes its electrical resistance thereacross, upon the movement of the movable component. The pressure sensor is configured, such that leads can be coupled to the pressure sensing component and the pressure sensing component can output a signal via the leads. The signal is related to pressure to which the pressure sensor is exposed. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |