| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface-emission semiconductor laser element which emits a stable laser beam of a higher-order mode. SOLUTION: The surface-emission semiconductor laser element comprises a lower reflecting mirror consisting of a semiconductor multi-layer film, an active layer, and an upper reflecting mirror consisting of a semiconductor multi-layer film, sequentially stacked on a substrate. The laser element is formed as a mesa post having a current-constriction layer in a region close to the active layer of the upper or lower reflecting mirror. The laser element is provided with a compound semiconductor layer 24 which extends on the upper reflecting mirror with a first opening that exposes the upper reflecting mirror, and a metal film that comprises an annular film 68 which extends annularly on the compound semiconductor layer 24 with a second opening that exposes the upper reflecting mirror in an inner side region of the first opening and an island-patterned film 64 arranged like an island on the upper reflecting mirror in an inner side region of the second opening. COPYRIGHT: (C)2006,JPO&NCIPI
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