SOLID STATE IMAGING DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a solid state imaging device which can be formed at low temperature and can ease microfabrication. SOLUTION: The solid state imaging device is provided with a photoelectric converter and a charge transfer having a charge transfer electrode to transfer charges generated in the photoelectric converter. The charge transfer electrode is formed by arranging alternately a first electrode formed of a first layer conductive film, and a second electrode formed of a second conductive film. The first and second electrodes are insulated/isolated by an electrode-to-electrode insulating film formed of a side wall insulating film that is formed through CVD method as to cover the side wall of the first electrode. COPYRIGHT: (C)2006,JPO&NCIPI