| 摘要 |
PROBLEM TO BE SOLVED: To inhibit a measurement efficiency from lowering in a measuring apparatus using attenuated total reflection. SOLUTION: An incidence optical system 15 makes a light beam 13 incident such that a total reflection occurs on the interface 10b of a measuring chip 9, a reference liquid 11a previously prepared is disposed on the surface of a thin film layer 12, a light beam measuring means 29 measures a position of a dark line produced by the attenuated total reflection, on the basis of a measurement of a light intensity distribution of the light beam 13 forming the total reflection on the interface 10b, and a judging means 60 judges that the measurement using the attenuated total reflection is carried out normally when the position of the dark line is located in a predetermined tolerance zone. COPYRIGHT: (C)2006,JPO&NCIPI
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