| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe needle capable of measuring accurately an electric characteristic of a measured object by a four-terminal resistance measuring method, even in the measured object provided with a small electrode. SOLUTION: In this probe 1, tip parts 6 are brought into contact with an electrode of the measured object to measure the electric characteristic of the measured object. The probe uses the probe needle having a metal conductor 2 and an insulating coating film 3 provided in the metal conductor of which the cross-sectional shape is straight-angled, a pair comprising the two probe needles is inserted into one guide hole 27 in a guide plate 21 of a probe unit 100, and the electric characteristic of the measured object is measured by the four-terminal resistance measuring method wherein the tip parts 6 of the paired probe needles are brought into concurrent contact with the one electrode of the measured object. COPYRIGHT: (C)2006,JPO&NCIPI
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