| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the weight of a movable body without adversely affecting its properties, such as controllability, stiffness, and the like, which are required for it. <P>SOLUTION: In a stage device which has a movable body which is supported by a reference plane and is movable, a first hydrostatic bearing for supporting the movable body on the reference plane so as not to be contact with each other, a guide which has a guideway which guides the movable body in a predetermined direction, a second hydrostatic bearing for maintaining the guideway and the movable body so as not to be contact with each other, and a linear motor in which a moving element is provided in the movable body side. Lightening hole is formed in at least one part of the movable body to which the first hydrostatic bearing, the second hydrostatic bearing and the linear motor moving member are joined. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
