| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method that can precisely position a stator and a movable body alternately, and can inexpensively manufacture a high-output and high-efficiency electrostatic motor without the need for a high-accuracy machine tool. <P>SOLUTION: First, a plurality of electrodes are formed on the surface 12a of an insulating substrate 12 and light-shielding marks 30 of prescribed profiles independent from the electrodes are locally formed, and the stator 16 is manufactured. Next, a local region 52 of the insulating substrate adjacent to the light-shielding mark 30 on the surface 12a of the substrate is irradiated with light 54, whereby the local region 52 is removed along the rim 30a of the light-shielding mark 30 without substantially damaging the light-shielding mark, and an installation recess 28 is formed. Then, a positioning pin 40 of a first support member is tightly inserted into the installation recess 28 formed at the stator 16. By this, the stator 16 is fixed to the first support member in a state that the the stator is precisely positioned. The movable body is fixed to a second support member, too, in a state that the the movable body is precisely positioned. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
