| 摘要 |
PROBLEM TO BE SOLVED: To generate force canceling a dead weight of a probe contacting with a measured object and force as a spring element varied by a displacement of the probe, by a compact magnetic circuit. SOLUTION: An iron core 9 and a permanent magnet 8 integrated with a probe shaft 4 are arranged in a square opening part of a boxlike yoke 7, the permanent magnet 8 is opposed to an inner face of the yoke 7 having a fixed curvature, and the force containing a spring component varied along a z-direction of a probe moving direction with respect to a measuring shaft 15 of a shape measuring instrument is generated by a magnetic flux flowing a clearance between the both. The magnetic circuit is shielded in the yoke 7 because the yoke 7 is box-shaped, and the magnetic flux is precluded from being disturbed even when an iron material member is arranged in the vicinity thereof. COPYRIGHT: (C)2006,JPO&NCIPI
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