发明名称 MEMS SAW sensor
摘要 Devices and methods for acoustically measuring temperature and pressure are disclosed. A SAW sensor in accordance with an illustrative embodiment can include an electrode structure adapted to transmit and receive surface acoustic waves along a SAW delay line, temperature sensing means for measuring temperature along a first direction of the SAW delay line, and pressure sensing means for measuring pressure along a second direction of the SAW delay line. The SAW sensor can include an antenna adapted to wirelessly transmit and receive RF signals to and from an electrical interrogator unit that can be used to power the SAW sensor.
申请公布号 US2006075820(A1) 申请公布日期 2006.04.13
申请号 US20040964519 申请日期 2004.10.13
申请人 HONEYWELL INTERNATIONAL INC. 发明人 COBIANU CORNEL P.;PAVELESCU IOAN;COOK JAMES D.
分类号 G01L11/00 主分类号 G01L11/00
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