发明名称 |
Method and system for manufacturing laminated microstructures |
摘要 |
A manufacturing system for a microstructure includes a rough motion stage having preobtained positioning accuracy and a large stroke length, a fine motion stage disposed on the rough motion stage and having higher positioning accuracy than the rough motion stage and a small stroke length, and the like collectively as a stage device disposed in a vacuum container, laser length measuring machines for measuring a distance to a mirror disposed on the fine motion stage, a stage control device for driving the fine motion stage by a result of measurement by the laser length measuring machines, and the like collectively as a stage control unit, and a pressing rod 44 for holding a pressure-contacting target member disposed opposite to a pressure-contacted member held by the stage device and pressure-contacting and separating the members, a pressure-contacting drive mechanism for applying a pressure-contacting force to the pressing rod 44, and the like collectively as a pressure-contacting mechanism unit. |
申请公布号 |
EP1602626(A3) |
申请公布日期 |
2006.04.12 |
申请号 |
EP20050101102 |
申请日期 |
2005.02.15 |
申请人 |
MITSUBISHI HEAVY INDUSTRIES, LTD.;FUJI XEROX CO., LTD. |
发明人 |
HASEGAWA, OSAMU;TSUNO, TAKESHI;YAMADA, TAKAYUKI;TAKAHASHI, MUTSUYA;ASANO, SHIN;TAWARA, SATOSHI;KINOUCHI, MASATO;GOTO, TAKAYUKI |
分类号 |
B29C65/00;B81C3/00;B05D1/00;B05D3/12;B81C1/00;B81C99/00;C07C2/02 |
主分类号 |
B29C65/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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