发明名称 Assembly and method for generating a hydrodynamic air bearing
摘要 A method and assembly for generating a hydrodynamic air bearing is described, wherein at least one rotor is rotated to force air through channels defined in a platen located adjacent to a linear belt and the forced air is directed to the linear belt. The method includes rotating at least one rotor with a motor such that the rotor forces air through channels defined in a platen, and the air is directed toward a linear belt. The assembly includes a housing in which a platen, rotors, and a bearing plate are located.
申请公布号 US7025660(B2) 申请公布日期 2006.04.11
申请号 US20030641914 申请日期 2003.08.15
申请人 LAM RESEARCH CORPORATION 发明人 TAYLOR TRAVIS R.;MEHRING CARSTEN
分类号 B24B7/19;B24B21/04;B24B37/04 主分类号 B24B7/19
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