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发明名称
Use of a gas supply device for delivering precurs ors with a low vapor pressure to cvd coating systems
摘要
申请公布号
HK1052031(A1)
申请公布日期
2006.04.07
申请号
HK20030104284
申请日期
2003.06.16
申请人
SCOTT AG
发明人
HARTMUT BAUCH;LARS BEWIG;LUTZ KLIPPE;THOMAS KUPPER
分类号
C23C16/448;(IPC1-7):C23C
主分类号
C23C16/448
代理机构
代理人
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