| 摘要 |
PROBLEM TO BE SOLVED: To carry articles without contamination with dust etc., even if an article carrying passage is not kept in a specially clean environment. SOLUTION: There is provided an article carrying robot 16 which grips the article 20 received from one clean area 10 via a pass box 22, by a manipulator 18, then travels on the carrying passage 14, and delivers the article 20 to the other clean area 12 via a pass box 28. There is also provided a clean carrier system. Herein the manipulator 18 has a cleaning device 34 at the tip thereof, for keeping the environment of the article 20 clean. COPYRIGHT: (C)2006,JPO&NCIPI
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