| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid crystal display for reducing a manufacturing cost and for improving the productivity by reducing the number of photolithography processes. SOLUTION: The manufacturing method includes the steps of: forming a gate electrode and a gate pad by vapor-depositing first and second metallic films on a TFT part and a gate pad connection part and patterning those metallic films; forming an insulating film on the entire surface; forming first and second silicon film patterns on the insulating film of the TFT part, those patterns being formed so that the lower surface of the entire second amorphous silicon film abut against a first amorphous silicon film surface; forming source and drain electrodes on the TFT part and removing the second amorphous silicon film between the source and drain electrodes; forming a protective film so that portion of the drain electrode and gate pad are exposed and removing the insulating film on a portion of the gate part; and forming first and second pixel electrodes. The first metal film is the metallic film of one of Mo, Ta, and Ti and the second metal film is the metal film of Al or Al alloy. COPYRIGHT: (C)2006,JPO&NCIPI |
