| 摘要 |
PROBLEM TO BE SOLVED: To provide a work carrying device capable of stably carrying even a thin and low rigid flexible substrate, formed in a compact mechanism, and having excellent carrying efficiency and a work carrying method. SOLUTION: This work carrying device carrying the substrate 6 at a working position by moving substrate holding parts 20 holding the substrate 6 along a circulation route is so formed that the circulation route in which a work holding part on which the substrate 6 is placed is circulated is formed of movable rails 11b, 12b, 16, and 17 and a fixed rail 18 which guide the movement of the substrate holding parts 20 and allowing the transfer of the substrate holding parts 20 from one to the other thereof and the substrate holding parts 20 are stopped at a stop position set in the circulation route. Thus, the thin and low rigid substrate 6 can be stably and efficiently carried by the substrate holding parts 20 of less quantity. COPYRIGHT: (C)2006,JPO&NCIPI
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