发明名称 Test structures for feature fidelity improvement
摘要 Systems and techniques for generating test structures. The test structures may conform to a set of design rules for a portion of an integrated circuit design. The test structures may include base figures, which may be in an enriched environment. For example, the test structures may include one or more additional figures such as surrounding figures, external figures, and/or symmetric figures. A correction algorithm for correcting a layout may be checked using a plurality of the test structures.
申请公布号 US2006075366(A1) 申请公布日期 2006.04.06
申请号 US20040955748 申请日期 2004.09.30
申请人 JEONG SEONGTAE;BORODOVSKY YAN 发明人 JEONG SEONGTAE;BORODOVSKY YAN
分类号 G06F17/50;G06F9/455 主分类号 G06F17/50
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