发明名称 ANORDNUNG MIT AKUSTISCHEN WELLEN GELEITET IN EINER PIEZOELEKTRISCHEN DÜNNSCHICHT, GEKLEBT AUF EINEM TRÄGERSUBSTRAT UND VERFAHREN ZUR HERSTELLUNG
摘要 A surface acoustic wave device including a thin layer of piezoelectric material, a layer of molecular bonder, and a carrier substrate. The thin layer constitutes an acoustic energy guide that augments the performance characteristics of the device. A method for making the acoustic wave device includes a step of molecular bonding between a carrier substrate and a piezoelectric substrate, and then a step for reducing the thickness of the piezoelectric substrate.
申请公布号 DE69923667(T2) 申请公布日期 2006.04.06
申请号 DE1999623667T 申请日期 1999.12.21
申请人 THALES, PARIS 发明人 WRIGHT, PETER
分类号 H01L41/09;H03H9/02;H01L41/18;H01L41/22;H03H3/08;H03H3/10;H03H9/10;H03H9/25;H03H9/68 主分类号 H01L41/09
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