| 摘要 |
PROBLEM TO BE SOLVED: To provide a pre-alignment device allowing a substrate to be positioned without being held, an alignment device and a liquid droplet ejection apparatus provided with the same, a method of manufacturing an electro-optical device, and an electro-optical device, an electronic apparatus, and a method of manufacturing an electronic apparatus. SOLUTION: The pre-alignment device includes; X-direction guide members 85 which are arranged on both sides of a mother substrate 127 in an X direction so that the shortest gap W2 is larger than an external dimension W1 of the mother substrate 127 when placing the mother substrate 127 on an absorption table 19; Y-direction guide members 86 arranged on both sides of the mother substrate in a Y direction; and an air suction/supply device 71 which sucks and fixes the mother substrate 127 onto the absorption table 19. The mother substrate 127 is placed within an area surrounded with the X-direction guide members 85 and Y-direction guide members 86 and then is positioned by using the air suction/supply device 71. COPYRIGHT: (C)2006,JPO&NCIPI
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