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发明名称
FILTER DEVICE
摘要
申请公布号
EP1600199(A4)
申请公布日期
2006.04.05
申请号
EP20040717304
申请日期
2004.03.04
申请人
ENTEGRIS, INC.
发明人
SATO, NOBUO,
分类号
B01D35/30;B01D29/96
主分类号
B01D35/30
代理机构
代理人
主权项
地址
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