| 摘要 |
A method for controlling the drive of an actuator of an active vibration isolation support system is provided in which one cycle of the actuator moving a movable member out and back is divided into a plurality of micro time regions, a voltage applied to the actuator is duty-controlled in each micro time region, and the duty ratio in at least the last micro time region is set to 0%. As a result, the current passing through the actuator can be made 0 in the final stage of the out and back movement cycle before the movable member moves back to the original position. This can minimize the current passing when the movable member moves back to its original position at the end of the cycle, thus suppressing the needless generation of heat in a coil of the actuator. Therefore, it is possible to prevent an increase in the electrical resistance of the coil which would otherwise hinder the achievement of a required value of current, and to prevent thermal damage to equipment surrounding the coil.
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