| 摘要 |
IN A FINGER MOUNTING STRUCTURE FOR A ROBOT ARM ADAPTED TO COLLECTIVELY CONVEYING WAFERS IN A SEMICONDUCTOR MANUFACTURING DEVICE, FIRST BRACKETS 35 EACH OF WHICH IS SUBSTANTIALLY RECTANGULAR IN CONFIGURATION AND HAS A RECTANGULAR RECESS 38 IN THE UPPER SURFACE WHICH IS OPEN ON ONE SIDE AND HAS A PLURALITY OF FINGER MOUNTING THROUGH - HOLES 41 AND THREADED HOLES 40 IN THE BOTTOM, AND SECOND BRACKETS 35A EACH OF WHICH IS SIMILAR TO THE FIRST BRACKET 35 EXPECT THAT THE THROUGH-HOLES AND THE THREADED HOLES ARE SWAPED IN POSITION WITH EACH OTHER, ARE STACKED ALTERNATELY WHILE FINGERS ARE INSERTED INTO THE RECESSED 38, RESPECTIVELY, EACH FINGER BEING SECURED WITH MOUNTING SCREWS WHICH ARE INSERTED INTO THE THROUGH-HOLES AND SCREWED INTO THE TREADED HOLES LOCATED IMMEDIATEL BELOW THE THROUGH MOUNTING HOLES FORMED IN THE FINGER.(FIG. 2)
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