| 摘要 |
PROBLEM TO BE SOLVED: To provide a signal processing technique for linear scale, and a signal processing device and a positioning device for linear scale to use each linear scale as if one long scale by connecting a plurality of linear scales. SOLUTION: A signal switching section 11 contains a phase difference detector 14 deriving the phase difference between signals H1 and H2, a correcting section 16 correcting the signals H2 depending on the phase difference to output signals H21, and a selection section 17 selecting either one from the signals H1 or signals H21 depending on the signals SW outputted from a sensor 8. Since the phase difference between signals H21 and signals H1 is lost, the signals OT become the signals with continuous variation. Thus, it becomes possible to detect the position of the object to be measured with high precision. COPYRIGHT: (C)2006,JPO&NCIPI
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