发明名称 COMPOSITION FOR STRIPPING PHOTORESIST AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR ARRAY PANEL USING THE SAME
摘要 The present invention provides a photoresist stripper comprising about 5 wt% to about 20 wt% alcohol amine, about 40 wt% to about 70 wt% glycol ether, about 20 wt% to about 40 wt% N-methyl pyrrolidone, and about 0.2 wt% to about 6 wt% chelating agent.
申请公布号 KR20060028523(A) 申请公布日期 2006.03.30
申请号 KR20040077501 申请日期 2004.09.24
申请人 DONGJIN SEMICHEM CO., LTD.;SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK, HONG SICK;YOON, SUK IL;KIM, SEONG BAE;KIM, WY YONG;HUH, SOON BEOM;KIM, BYUNG UK;JEONG, JONG HYUN
分类号 G03F7/42 主分类号 G03F7/42
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