| 摘要 |
PROBLEM TO BE SOLVED: To provide a technological means capable of drying work at a processing stage in a short period of time with respect to a drying method of a disk of an apparatus for processing a relatively small disk (a disk work), of a periphery processing apparatus of a lens centration, recording medium disk, and the like. SOLUTION: By rotating a rotation spindle 5 at high speed while processed work 9 is held at the tip of the spindle and jetting dry air obliquely at a surface on the opposite side of holding the work, processing liquid adhered on a disk is removed and high-speed dry is realized by synergism of centrifugal force by rotation and blowing force by jet stream. By using heated air as jet air, a disk surface after removing the processing liquid can be dried. As drying of the work is performed at the processing stage, drying equipment does not need to be provided separately. Also, as drying is performed together with a scattering action of the processing liquid by centrifugal force and air blast, drying in a short time is made possible. COPYRIGHT: (C)2006,JPO&NCIPI
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