| 摘要 |
PROBLEM TO BE SOLVED: To improve transfer accuracy of a grating face by increasing the release property of a replica substrate from a master grating as a mold. SOLUTION: A fluorine-based surface treating agent is applied on the grating face of a master grating 10 to form a release agent layer 13, which is then subjected to vacuum vapor deposition of aluminum to form a thin film 23 (c). A thermosetting adhesive 22 is applied on a replica substrate 21 (e), which is then laminated with the master grating 10 having the aluminum thin film 23 formed thereon through the adhesive 22 (f). When the substrate is stripped from the mold along the release agent layer 13 after the adhesive 22 is cured, both members are easily separated from each other and the aluminum thin film 23 is reverse transferred to the replica substrate 21 to complete a replica grating 20. The release agent layer 13a remaining on the grating face of the replica grating 20 functions as a protective layer to increase contamination preventing property, wear resistance or the like. COPYRIGHT: (C)2006,JPO&NCIPI
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