MEASUREMENT METHOD AND PRODUCTION MANAGEMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a measurement method for double refraction less depending on the temperature/humidity of measurement atmosphere with excellent measurement repeatability as to measurement on double refraction of a phase difference film, and further to provide a production management method using the measurement method. SOLUTION: A double refraction measuring instrument is equipped with: a set of one or more pairs of polarizers and analyzers put in a parallel Nicol state; a means for detecting the intensity of beams transmitted by a polarizer for light of a specific wavelength, by a specimen film under measurement, and by an analyzer, with the specimen film of 5 to 200μm film thickness put between the polarizer and the analyzer; and a means for calculating the orientation degree and the direction of the main refraction factor on the specimen film from the direction and intensity of polarization of each transmitted beam. This measurement method is characterized in that double refraction is measured by using the measuring instrument while holding the specimen film so as to cause its flatness to be 10μm or less with a measurement range of 1 to 100 cm2. COPYRIGHT: (C)2006,JPO&NCIPI