摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for liquid jet head which well discharges liquid drops by unerringly preventing a defective discharge such as the blocking of nozzles by foreign matter, a liquid jet head and a liquid jet device. SOLUTION: The liquid jet head manufacturing method has the process of forming a piezoelectric element on one side of a channel forming substrate on one side of a channel forming substrate through a diaphragm and forming a through hole by removing a diaphragm of an area to be a communication section, the process of forming a lead electrode made up of a contact layer and a wiring metal layer and sealing a through hole by a discontinuous metal layer discontinuous from the lead electrode made up of the contact layer and the wiring metal layer, the process of joining a reservoir forming substrate to one side of the channel forming substrate, the process of forming a pressure generation chamber and a communication section by wet etching a channel forming substrate, the process of making the reservoir section communicate with the communication section by removing the discontinuous metal layer by wet etching the discontinuous metal layer and the process of forming a sealing metal layer by covering the end face of the contact layer and the wiring metal layer forming the discontinuous metal layer. COPYRIGHT: (C)2006,JPO&NCIPI
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