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发明名称
Chemische-mechanische Schleifzusammensetzung für Halbleiterverarbeitung
摘要
申请公布号
DE60017642(T2)
申请公布日期
2006.03.30
申请号
DE20006017642T
申请日期
2000.05.19
申请人
ETERNAL CHEMICAL CO., LTD.
发明人
LEE, TSUNG-HO;LEE, KANG-HUA;YEH, TSUI-PING
分类号
C09G1/02;C09K3/14
主分类号
C09G1/02
代理机构
代理人
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地址
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