| 摘要 |
PROBLEM TO BE SOLVED: To promote sintering of a thick film electrode, and to enable low- temperature burning by composing a composition of Ag powder, at least one kind of metal among V, Mo, W or the compound thereof and an organic vehicle. SOLUTION: V, Mo, W or the compound thereof, which is added in the Ag paste, generates a compound oxide layer from a low temperature area at about 400 deg.C toward a surface of the Ag grains as a conductive component at the time of burning the Ag paste. Since Ag is scattered through this reaction layer, necking of Ag from the low-temperature area and grow of the grains are started. When temperature rises more, the compound oxide phase generated in an Ag electrode is melted, and the melted liquid helps liquid phase sintering of the Ag grains so as to promote the sintering of the Ag electrode. Diffusion of Ag in an insulating film is facilitated by melting the reflection preventing film of a surface of a Si wafer and the insulating film of SiO2 , and contact resistance to the Si wafer is lowered. |
