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发明名称
Pressure controlled degas system for hot cathode ionization pressure gauges
摘要
申请公布号
GB2407699(B)
申请公布日期
2006.03.29
申请号
GB20050002296
申请日期
2003.07.25
申请人
MKS INSTRUMENTS,INC.
发明人
NEIL T PEACOCK;STACY W WADE
分类号
G01L21/32
主分类号
G01L21/32
代理机构
代理人
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