摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor which is highly durable to the poisoning of phosphorus, etc. SOLUTION: An oxygen sensor comprises an oxygen concentration cell 3 that porous electrodes 3b and 3c are formed on both sides of a solid electrolyte substrate 3a, an oxygen pumping element 5 that porous electrodes 5b and 5c are formed on both sides of the solid electrolyte substrate 5a as well, and a spacer 9 laminated between both these elements 3 and 5 to form a gas measuring chamber 7. This spacer 9 is provided with a pair of communication holes 19a on the right and left sides for the communication between the gas measuring chamber 7 and the outside, and dispersion velocity regulating layers 21a in which porous material is filled are formed in each of the communication holes 19a. These dispersion velocity regulating layers 21 regulate the velocity of a gas to be detected flowing into the gas measuring chamber 7. The whole of the dispersion velocity regulating layers 21 are especially formed of zirconium with a large number of gas permeating pores. |