发明名称 Gallium arsenide HBT having increased performance and method for its fabrication
摘要 According to one exemplary embodiment, a gallium arsenide heterojunction bipolar transistor comprises a collector layer and a first spacer layer situated over the collector layer, where the first spacer layer is a high-doped P+ layer. For example, the first spacer layer may comprise GaAs doped with carbon. The gallium arsenide heterojunction bipolar transistor further comprises a base layer situated over the first spacer layer. The base layer may comprise, for example, a concentration of indium, where the concentration of indium is linearly graded in the base layer. The base layer may comprise InGaAsN, for example. The gallium arsenide heterojunction bipolar transistor further comprises an emitter layer situated over the base layer. The emitter layer may comprise, for example, InGaP.
申请公布号 US7019383(B2) 申请公布日期 2006.03.28
申请号 US20030376371 申请日期 2003.02.26
申请人 SKYWORKS SOLUTIONS, INC. 发明人 ZAMPARDI PETER J.;CHOI KEVIN;RUSHING LANCE G.
分类号 H01L27/082;H01L;H01L21/331;H01L29/10;H01L29/20;H01L29/737;H01L31/0328 主分类号 H01L27/082
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