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发明名称
Fremgangsmåde til fremstilling af en enhed med en rumlig overfladestrukturering samt anvendelse af denne fremgangsmåde
摘要
申请公布号
DK1502156(T3)
申请公布日期
2006.03.27
申请号
DK20030749830T
申请日期
2003.05.07
申请人
UNAXIS BALZERS AKTIENGESELLSCHAFT
发明人
GRABHER, PATRICK;HEINE-KEMPKENS, CLAUS;BISCHOFBERGER, ROGER
分类号
G03F7/00;G02B7/00;G03F7/40;G03F7/42;H01L21/027
主分类号
G03F7/00
代理机构
代理人
主权项
地址
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