| 摘要 |
PROBLEM TO BE SOLVED: To surely correct an astigmatism in the axial direction rotated at 45°from X and Y axes regarding a focus/astigmatism correcting adjusting method in an electron-beam exposure system. SOLUTION: The electron-beam exposure system has a focus adjusting mechanism using a knife-edge method and an astigmatism correcting mechanism. In the electron-beam exposure system using a knife-edge method measuring apparatus 2 as an absorption electronic signal detector, the astigmatism is corrected precedently by using an astigmatism corrector 6, and a focus adjustment is conducted using an object lens 4. COPYRIGHT: (C)2006,JPO&NCIPI
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