| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid drop delivery apparatus capable of discovering or previously preventing reduction of delivery performance of the liquid drop by detecting whether or not peeling off of a nozzle plate of a delivery head is generated. SOLUTION: The liquid drop delivery apparatus for delivering the liquid drop to a work W has a liquid storage part 300 for storing the liquid; and a delivery head 11 fed with the liquid from the liquid storage part and delivering the liquid drop. The nozzle plate 64 formed with a nozzle hole is arranged on the delivery head. Further, it is provided with a peeling off detection means 80 for detecting that the nozzle plate is peeled off from the delivery head. COPYRIGHT: (C)2006,JPO&NCIPI
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