| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a chemical supplying pump unit which is reduced in size by manufacturing a pump and each of opening and closing valves before and behind the pump as a unit and which can prevent the occurrence of air bubbles or the retention of the chemical in the chemical flow path in the unit. <P>SOLUTION: In the pump unit 10, a suction-side flow path member 17 in which a suction-side shutoff valve 13 is integrally provided and a discharge-side flow path member 18 in which a discharge-side shutoff valve 14 is integrally provided, are assembled integrally with the pump 11(pump housings 21, 22) so that suction passages 17a, 21b communicating with a pump chamber 25 and discharge passages 18a, 21c are extended on the same straight line L1. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
