| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treat furnace using no brick in the furnace body. SOLUTION: In the heat treat furnace 2 for heating and treating a treated object W, each of a ceiling section 5c, a floor section 5d, and sidewalls 5a and 5b of the furnace body 5 comprises a metallic furnace shell layer 31, an insulating layer 32 disposed inside the furnace shell layer 31, and a ceramic fiber layer 33 disposed inside the insulating layer 32. A plurality of rails 20A-20D for supporting the treated object W are disposed, and both ends of each of the rails 20A-20D are supported by supporting members 55 and 55. COPYRIGHT: (C)2006,JPO&NCIPI |
