| 摘要 |
PROBLEM TO BE SOLVED: To produce nanoparticles having fine and uniform size distribution, in one process. SOLUTION: The laser ablasion device comprises a reaction chamber 10 provided with an electric discharge space therein; a suscepter 12 positioned in the reaction chamber, and equipped with a target 14; a laser generating portion 30 sputtering the target by a laser beam, and causing plasma electric discharge including positive charge and negative charge in the electric charge space 20; and a high voltage (HV) generating portion 40 applying positive bias voltage to a predetermined position exposed toward the electric discharge space, and drawing the negative charge from the electric discharge space to the predetermined position. COPYRIGHT: (C)2006,JPO&NCIPI
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