METHOD AND EQUIPMENT FOR FORMING RESIN FILM

摘要

A process of spreading a liquid-state material such as adhesive supplied on the inner circumference side between boards of an optical disk, etc. or a material supplied on the inner circumference side on the board by high-speed rotation and a process of spreading such material by low-speed rotation are alternately performed a plurality of times. While the material is being rotated at a low-speed, beam irradiation is shifted successively or continuously or intermittently from the inner circumference side to the outer circumference side, and the liquid-state material is successively semi-hardened or hardened from the inner circumference side. Thus the thickness of a resin film formed from the liquid-state material is decided stepwise from the inner circumference side to the outer circumference side.