发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide an electrode pad with which connection of a burn-in application electrode pad and an electrode pad becomes easy at the time of burn-in and to suppress a terminal connection fault at the time of burn-in. SOLUTION: In a semiconductor element, the burn-in application electrode pads 2 used in burn-in are formed on a chip rear face and a plane inside a chip. Thus, limit of a pad pitch and a pad opening size is largely relieved in the electrode pads 2 formed on the chip rear face and the inner plane. Consequently, the electrode pad with which connection of the burn-in application electrode pad 2 and the electrode pad of a burn in board becomes easy is supplied and the terminal connection fault of burn-in can be suppressed. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006080102(A) 申请公布日期 2006.03.23
申请号 JP20040259100 申请日期 2004.09.07
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 NAGAI NORIYUKI
分类号 H01L23/52;H01L21/3205;H01L21/66;H01L21/822;H01L27/04 主分类号 H01L23/52
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