| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring apparatus for highly accurately measuring the characteristics of a specimen in an oblique direction. SOLUTION: This measuring apparatus 100, comprising an illumination system including a light source 11 for letting light into the specimen 19 put between two transparent members 17 and 18 and a light reception system including a light receiving part 15 for receiving light passing through the specimen 19, is used for measuring the characteristics of the specimen 19 in the measurement domain 19a based on the light received by the receiving part 15. This apparatus 100 is equipped with a control part 20 for controlling the positions of the specimen 19, the illumination system, and the reception system. Prior to the start of measurement, the control part 20 calculates the travel (hereinafter referred to as a first travel) in the X direction of at least one of the illumination system and the reception system, the travel being required to maximize a light receiving amount at the receiving part 15 with the illumination system and the reception system, respectively, inclined at a prescribed angleθfrom a direction vertical to the specimen 19. Control is performed so as to move at least one of the illumination system and the reception system in the X direction by the first travel. COPYRIGHT: (C)2006,JPO&NCIPI
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