INTERFERENCE MEASUREMENT METHOD AND DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an interference measurement method and an interference measurement device which decrease a coherent noise with a high precision. SOLUTION: The device emits a light from a light source and divides the light. One side divided light penetrates or reflects through an optical system and an optical part to be measured and is formed as a light to be detected. The other side divided light penetrates or reflects by a reference surface and is formed as a reference light. This interference measurement method performs a measurement of a wave surface of the optical system and the optical part to be measured by an interference state through interfering the above light to be detected and reference light. The light flux emitted from the light source is characterized that the above light flux is passing at least through two phase moderators. COPYRIGHT: (C)2006,JPO&NCIPI