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发明名称
APPARATUS USING HOLOGRAM LITHOGRAPHY
摘要
申请公布号
KR20060025890(A)
申请公布日期
2006.03.22
申请号
KR20040074756
申请日期
2004.09.17
申请人
HYNIX SEMICONDUCTOR INC.
发明人
MOON, JAE IN
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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