| 摘要 |
PURPOSE:To maintain the space of equipment zones fully in a clean room and increase the degree of freedom of a clean tunnel and improve its utility value by a method wherein supporting walls are provided to the boundary of a working zone and the equipment zones and filter units are fitted to both sides of the supporting walls stretching toward outside. CONSTITUTION:A clean tunnel 24 is provided in a clean room 20 and a filter unit 29 for a working zone is fitted to the upper part between supporting walls 27 and 28 which are provided to the boundary of the working zone 25 and the equipment zones 26a, 26b. The filter units 30, 31 are also provided to the upper outside parts stretching toward outside. Although the space of the central working zone 25 is limited by the supporting walls 27, 28, the outside spaces of the equipment zones 26a, 26b are not limited and the space can be maintained fully as far as to the inner wall of the clean room 20. Therefore the limitation against processing equipments 38 can be released and the degree of freedom of the clean tunnel 24 can be increased and its utility value can be improved. |
