发明名称 FLUORINE-CONTAINING COMPOUNDS AND THEIR POLYMERS USEFUL FOR ANTI-REFLECTION FILM MATERIALS AND RESIST COMPOSITIONS
摘要 A fluorine-containing compound represented by the formula 1, where R1 is a methyl group or trifluoromethyl group, each of R2 and R3 is independently a hydrogen atom or a group containing (a) a hydrocarbon group having a straight-chain, branched or ring form and having a carbon atom number of 1-25 or (b) an aromatic hydrocarbon group, the group optionally containing at least one of a fluorine atom, an oxygen atom and a carbonyl bond, l is an integer of from 0 to 2, each of m and n is independently an integer of 1-5 to satisfy an expression of m+n≦̸6, and when at least one of R1, R2 and R3 is in a plural number, the at least one of R1, R2 and R3 may be identical with or different from each other.
申请公布号 KR100562442(B1) 申请公布日期 2006.03.17
申请号 KR20030054319 申请日期 2003.08.06
申请人 发明人
分类号 G03F7/039;C08F14/18 主分类号 G03F7/039
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