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发明名称
METHO FOR IMPLANTATION IN SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100562628(B1)
申请公布日期
2006.03.17
申请号
KR20040060740
申请日期
2004.07.31
申请人
发明人
分类号
H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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