| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized and low-cost inertia sensor for detecting low acceleration in every direction. SOLUTION: An elastically deformable rubber material 16 is disposed in a case 28 with the rubber material 16 connected to a support member 14 on the base end side thereof. The rubber material 16 comprises one inflection part 16A where its extending direction changes at a right angle and is given a cantilever beam structure formed into an L-shape. A weight 18 formed into a rectangular solid shape is attached to the rubber material 16 on its end side with the weight 18 being displaceable following with the elastic deformation of the rubber material 16. A magnetic field generating member 20 for generating a magnetic field is disposed by being applied to an end face 18A of the weight 18. A spin valve type GMR element 22 capable of detecting a change in the magnetic flux direction of the generating member 20 is disposed at a position confronting the generating member 20. COPYRIGHT: (C)2006,JPO&NCIPI
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