| 摘要 |
PROBLEM TO BE SOLVED: To increase the positional accuracy of a glass substrate held by a hand, and to surely prevent the glass substrate from being damaged due to coming into contact with a magazine, etc. SOLUTION: A hand 21 of a transfer robot 10, movable frontward to and backward from a magazine 11, is provided with a plurality of chucking retaining means which chuck and retain a glass substrate 12, and a pivotal stand 20 of the transfer robot 10 is provided with a centering and positioning means 51 for centering and positioning the glass substrate, in a direction perpendicular to an accommodating direction, whereby the centering and positioning means centers and positions the glass substrate to pivot the pivotal stand. COPYRIGHT: (C)2006,JPO&NCIPI |
