| 摘要 |
PROBLEM TO BE SOLVED: To provide an indenter tip inspection device capable of further easily detecting micro wear or damage, and to provide an indenter tip inspection method. SOLUTION: The indenter tip inspection device 100 comprises an indenter moving section 10 for moving up and down an indenter A substantially vertically, a reserving section 30 that has an opening upper face and reserves viscous fluid 31 inside, and a weight measurement section 40 for measuring weight of the reserving section 30. A CPU 51 moves the indenter moving section 10 vertically downward, presses the tip (a) of the indenter A into the viscous fluid 31 reserved by the reserving section 30, then moves the indenter moving section 10 vertically upward, and pulls up the tip (a) of the indenter A from the viscous fluid 31 reserved by the reserving section 30. COPYRIGHT: (C)2006,JPO&NCIPI
|
