| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid controller that is easily installed in an inside of a semiconductor manufacturing device, easy to be connected to piping and wiring, capable of reducing the pressure loss due to the piping connection, capable of easily changing arrangement for each module, capable of preventing corrosion from occurring even if a corrosive fluid is used as the fluid, capable of changing setting of the flow rate after piping, capable of blocking a flow passage after piping, and capable of controlling the flow rate, even if the flowing-in fluid is pulsating. SOLUTION: This fluid controller has a flowmeter sensor part 4, having an ultrasonic oscillator 12 for emitting ultrasonic waves into the fluid, and an ultrasonic oscillator 13 for receiving ultrasonic waves from the ultrasonic oscillator 12 to output a signal to a flowmeter amplifier part 64, and a constant flow rate valve 5 for controlling pressure of the fluid by the operating pressure, and the flowmeter sensor part 4 and the constant flow rate valve 5 are installed inside one casing 2, having a fluid flowing-in inlet 3 and a fluid flowing-out outlet 6. COPYRIGHT: (C)2006,JPO&NCIPI
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